Concepedia

Soonyang Kwon

SK

Statistics

Publications

5

Citations

171

H-Index

5

Active since

2014

Affiliations

Seoul National University(Current)

Samsung (South Korea)

Soonyang Kwon is an author at Seoul National University specializing in materials science, metrology, and optical spectroscopy.

Publications per year

2014–2024

5

Publications

5

Microsphere-assisted, nanospot, non-destructive metrology for semiconductor devices

Soonyang Kwon, Jangryul Park, Kwangrak Kim et al. · Light Science & Applications · 2022 · 66 citations · Full text

Engineering, Electrical Engineering, Materials Science +16

Fast Analysis of Film Thickness in Spectroscopic Reflectometry using Direct Phase Extraction

Kwangrak Kim, Soonyang Kwon, Heui Jae Pahk · Current Optics and Photonics · 2017 · 35 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Volumetric thin film thickness measurement using spectroscopic imaging reflectometer and compensation of reflectance modeling error

Kwangrak Kim, Seongryong Kim, Soonyang Kwon et al. · International Journal of Precision Engineering and Manufacturing · 2014 · 31 citations

Natural Sciences, Materials Engineering, Materials Science +16

Microsphere-assisted hyperspectral imaging: super-resolution, non-destructive metrology for semiconductor devices

Jangryul Park, Young‐Sun Choi, Soonyang Kwon et al. · Light Science & Applications · 2024 · 22 citations · Full text

Engineering, Materials Science, Biomedical Optics +10

Correction of PZT scanner errors using a phase compensation method in white-light phase-shifting interferometry

Namyoon Kim, Soonyang Kwon · Applied Optics · 2021 · 17 citations

Engineering, Mechatronics Engineering, Instrumentation +16

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