Concepedia

Stuardo Robles

SR

Statistics

Publications

3

Citations

70

H-Index

3

Active since

1994

Affiliations

Applied Materials (United States)(Current)

Stuardo Robles is an author at Applied Materials (United States) specializing in thin films, engineering, and applied physics.

Top concepts

Publications per year

1994–1996

3

Publications

3

Moisture Resistance of Plasma Enhanced Chemical Vapor Deposited Oxides Used for Ultralarge Scale Integrated Device Applications

Stuardo Robles, Ellie Yieh, B. C. Nguyen · Journal of The Electrochemical Society · 1995 · 33 citations

, , +16

Surface Related Phenomena in Integrated PECVD/Ozone‐TEOS SACVD Processes for Sub‐Half Micron Gap Fill: Electrostatic Effects

Kurt kwok, Ellie Yieh, Stuardo Robles et al. · Journal of The Electrochemical Society · 1994 · 25 citations

, , +17

Gap Fill and Film Reflow Capability of Subatmospheric Chemical Vapor Deposited Borophosphosilicate Glass

Stuardo Robles, Kathleen Russell, M. Galiano et al. · Journal of The Electrochemical Society · 1996 · 12 citations

, , +15

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