Concepedia

Author

Seung-Wan Yoo

Chungnam National University

Also Known As

Seung-Wan Yoo

8

Publications

63

Citations

6

H-Index

17

Concepts

All Affiliations

Chungnam National UniversitySeoul National UniversityKorea Research Institute of Standards and Science
SY

About

Seung-Wan Yoo is an author at Chungnam National University specializing in nanomaterials, applied physics, and nanotechnology.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

2

2

25

2

Applied Physics

2

2

25

3

Materials Science

2

2

25

4

Chemical Engineering

1

1

14

5

Chemistry

1

1

14

Seung-Wan Yoo

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4

Publications

47

Citations

4

H-Index

YearCitations

Effect of substrate bias on deposition behaviour of charged silicon nanoparticles in ICP-CVD process

Seung-Wan Yoo, S. J. You, Jung‐Hyung Kim,

Journal of Physics D Applied Physics

2016

14

<i>In-Situ</i>Measurements of Charged Nanoparticles Generated During Hot Wire Chemical Vapor Deposition of Silicon Using Particle Beam Mass Spectrometer

Ju-Seop Hong, Chansoo Kim, Seung-Wan Yoo,

Aerosol Science and Technology

2012

11

Control of nanoparticle size and amount by using the mesh grid and applying DC-bias to the substrate in silane ICP-CVD process

Seung-Wan Yoo, Nong‐Moon Hwang, S. J. You,

Journal of Nanoparticle Research

2017

11

Characteristics of SiO<sub>2</sub> Etching by Capacitively Coupled Plasma with Different Fluorocarbon Liquids (C<sub>7</sub>F<sub>14</sub>, C<sub>7</sub>F<sub>8</sub>) and Fluorocarbon Gas (C<sub>4</sub>F<sub>8</sub>)

Seung-Wan Yoo, Chul‐Hee Cho, Kyungtae Kim,

Applied Science and Convergence Technology

2021

11

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