Concepedia

Seung-Wan Yoo

SY

4

Publications

47

Citations

4

H-Index

2012

Active since

Affiliations

Chungnam National University(Current)

Seoul National University

Korea Research Institute of Standards and Science

Seung-Wan Yoo is an author at Chungnam National University specializing in nanomaterials, applied physics, and nanotechnology.

Top concepts

Publications per year

2012–2021

4

Publications

4

Effect of substrate bias on deposition behaviour of charged silicon nanoparticles in ICP-CVD process

Seung-Wan Yoo, S. J. You, Jung‐Hyung Kim et al. · Journal of Physics D Applied Physics · 2016 · 14 citations

, , +21

<i>In-Situ</i>Measurements of Charged Nanoparticles Generated During Hot Wire Chemical Vapor Deposition of Silicon Using Particle Beam Mass Spectrometer

Ju-Seop Hong, Chansoo Kim, Seung-Wan Yoo et al. · Aerosol Science and Technology · 2012 · 11 citations · Full text

, , +15

Control of nanoparticle size and amount by using the mesh grid and applying DC-bias to the substrate in silane ICP-CVD process

Seung-Wan Yoo, Nong‐Moon Hwang, S. J. You et al. · Journal of Nanoparticle Research · 2017 · 11 citations

Characteristics of SiO<sub>2</sub> Etching by Capacitively Coupled Plasma with Different Fluorocarbon Liquids (C<sub>7</sub>F<sub>14</sub>, C<sub>7</sub>F<sub>8</sub>) and Fluorocarbon Gas (C<sub>4</sub>F<sub>8</sub>)

Seung-Wan Yoo, Chul‐Hee Cho, Kyungtae Kim et al. · Applied Science and Convergence Technology · 2021 · 11 citations · Full text

Rows per page

1–4 of 4