4
Publications
154
Citations
4
H-Index
2001
Active since
Affiliations
Ramaswamy Sreenivasan is an author at Massachusetts Institute of Technology specializing in engineering, materials science, and chemical engineering.
Top concepts
EngineeringMaterial ScienceMicrofabricationChemical EngineeringBusinessHydrogenPolymersChemistryCalibrationMicrofluidics
Publications per year
2001–2011
4
4
Run to run control in tungsten chemical vapor deposition using H2/WF6 at low pressures
Ramaswamy Sreenivasan, Theodosia Gougousi, Yiheng Xu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 10 citations
Engineering, Process Instrumentation, Instrumentation Engineering +16
Rows per page
1–4 of 4