Yiheng Xu

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Active since

2000

Affiliations

University of Maryland, College Park(Current)

Yiheng Xu is an author at University of Maryland, College Park specializing in chemical vapor deposition, reactor instrumentation, and process instrumentation.

Publications per year

2000–2001

Publications

Process diagnostics and thickness metrology using <i>in situ</i> mass spectrometry for the chemical vapor deposition of W from H2/WF6

Theodosia Gougousi, Yiheng Xu, John N. Kidder et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 18 citations

Natural Sciences, Chemistry, Materials Science +17

Run to run control in tungsten chemical vapor deposition using H2/WF6 at low pressures

Ramaswamy Sreenivasan, Theodosia Gougousi, Yiheng Xu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 10 citations

Engineering, Materials Engineering, Materials Science +17

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