Statistics
Publications
2
Citations
62
H-Index
2
Active since
2003
Affiliations
Panasonic (Japan)(Current)
M. Endo is an author at Panasonic (Japan) specializing in optical materials, materials science, and mask fabrication.
Publications per year
2003–2004
2
2
Actinic mask metrology for extreme ultraviolet lithography
Hiroo Kinoshita, Tsuneyuki Haga, Kazuhiro Hamamoto et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 33 citations
Engineering, Manufacturing Engineering, Materials Science +12
Tsuyohiko Fujigaya, Yuji Sibasaki, Shinji Ando et al. · Chemistry of Materials · 2003 · 29 citations
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