Statistics
Publications
21
Citations
467
H-Index
14
Active since
1991
Affiliations
Tsuneyuki Haga is an author at NTT (Japan) specializing in natural sciences, materials science, and materials engineering.
Publications per year
1991–2015
21
21
Actinic mask metrology for extreme ultraviolet lithography
Hiroo Kinoshita, Tsuneyuki Haga, Kazuhiro Hamamoto et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 33 citations
Engineering, Manufacturing Engineering, Materials Science +12
Katsuyoshi Hayashi, Junichi Takahashi, Tsutomu Horiuchi et al. · Journal of The Electrochemical Society · 2008 · 30 citations
1–5 of 21