Concepedia

R. P. W. Lawson

RP

12

Publications

328

Citations

11

H-Index

1966

Active since

Affiliations

University of Alberta(Current)

University of Salford

Western University

R. P. W. Lawson is an author at University of Alberta specializing in applied physics, materials science, and engineering.

Top concepts

EngineeringApplied PhysicsMaterial ScienceThin FilmsSurface ScienceElectrical EngineeringMicroelectronicsMaterials EngineeringChemistryMicrostructure

Publications per year

1966–2003

12

Publications

12

The effects of oxygen contamination on the properties of reactively sputtered indium nitride films

K. L. Westra, R. P. W. Lawson, Michael J. Brett · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1988 · 82 citations

Materials Science, Oxygen Contamination, Electrical Engineering +13

Thin film deposition using low-energy ion beams. I. System specification and design

Jun Amano, Paul W Bryce, R. P. W. Lawson · Journal of Vacuum Science and Technology · 1976 · 62 citations

Engineering, Carbon Substrates, Thin Film Process Technology +19

Construction, characterization and applications of a compact mass-resolved low-energy ion beam system

W. M. Lau, X. H. Feng, I. Bello et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1991 · 30 citations

Engineering, Physics, Applied Physics +8

Gas phase pulse etching of silicon for MEMS with xenon difluoride

Isaac Chan, K.B. Brown, R. P. W. Lawson et al. · 2003 · 30 citations

Materials Science, Electrical Engineering, Engineering +13

Deposition of indium nitride by low energy modulated indium and nitrogen ion beams

I. Bello, W. M. Lau, R. P. W. Lawson et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 24 citations

Materials Science, Argon Ion Sputtering, Ion Implantation +15

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