K. L. Westra - Concepedia

Author

K. L. Westra

University of Alberta

Also Known As

K L Westra, K Westra, K. L. Westra, K. Westra, K.L. Westra, K. L. Westra, Kenneth L. Westra

Publications

1.1K

Citations

H-Index

Concepts

All Affiliations

University of Alberta University of Manitoba National Institute for Nanotechnology Alberta Energy Lawrence Berkeley National Laboratory

About

K. L. Westra is an author at University of Alberta specializing in applied physics, materials science, and engineering.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	15	19	806
2	Applied Physics	15	19	806
3	Chemical Engineering	2	2	109
4	Medicine	1	1	45
5	Chemistry	1	1	74

K. L. Westra

Publications

Citations

H-Index

Page 1

	Year	Citations
Metallic NEMS components fabricated from nanocomposite Al–Mo films Zonghoon Lee, Colin Ophus, L. M. Fischer, Nanotechnology	2006	243
Tip artifacts in atomic force microscope imaging of thin film surfaces K. L. Westra, Angela Mitchell, D. J. Thomson Journal of Applied Physics EngineeringAfm TipMicroscopyNanotribologyAfm Image	1993	101
Effect of tip shape on surface roughness measurements from atomic force microscopy images of thin films K. L. Westra, D. J. Thomson Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringAfm TipMicroscopyMechanical EngineeringTip Shape	1995	88
The effects of oxygen contamination on the properties of reactively sputtered indium nitride films K. L. Westra, R. P. W. Lawson, Michael J. Brett Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Materials ScienceOxygen ContaminationElectrical EngineeringEngineeringIndium Target	1988	82
Highly Ordered Organic Alq<sub>3</sub> Chiral Luminescent Thin Films Fabricated by Glancing‐Angle Deposition Peter C. P. Hrudey, K. L. Westra, Michael J. Brett Advanced Materials EngineeringOrganic ElectronicsOrganic ChemistryGlancing-angle DepositionOptoelectronic Devices	2005	74
High-resolution pattern generation using the epoxy novolak SU-8 2000 resist by electron beam lithography Mirwais Aktary, Martin O. Jensen, K. L. Westra, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringElectron-beam LithographyMicroscopyResist FormulationNm Patterns	2003	70
The microstructure of thin films observed using atomic force microscopy K. L. Westra, D. J. Thomson Thin Solid Films Materials ScienceEngineeringMicroscopyNanotechnologyMicrofabrication	1995	52
Comparison between ZEP and PMMA resists for nanoscale electron beam lithography experimentally and by numerical modeling K. Koshelev, Mohammad Mohammad, Taras Fito, Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena EngineeringElectron-beam LithographyPmma ResistsElectron DiffractionElectron Optic	2011	48
Atomic force microscope tip radius needed for accurate imaging of thin film surfaces K. L. Westra, D. J. Thomson Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringAfm TipMicroscopyAfm ImageElectron Microscopy	1994	45
Optical properties and microstructure of reactively sputtered indium nitride thin films Brian Sullivan, R. R. Parsons, K. L. Westra, Journal of Applied Physics Thin Film PhysicsOptical MaterialsSputtered IndiumEngineeringThin Film Process Technology	1988	44

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