Concepedia

Author

Chang Ju Choi

Chonnam National University

Also Known As

Chang J. Choi, Chang Ju Choi, Chang-Ju Choi, Ju Choi, Chang, Kwang Woo Jung

29

Publications

150

Citations

8

H-Index

32

Concepts

All Affiliations

Chonnam National University
CJ

About

Chang Ju Choi is an author at Chonnam National University specializing in engineering, applied physics, and natural sciences.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

6

6

107

2

Applied Physics

4

4

66

3

Natural Sciences

3

3

51

4

Chemical Engineering

3

3

55

5

Chemistry

2

2

41

Chang Ju Choi

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6

Publications

107

Citations

6

H-Index

YearCitations

Ar addition effect on mechanism of fluorocarbon ion formation in CF4/Ar inductively coupled plasma

Chang Ju Choi, Osung Kwon, Yeo Song Seol,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

2000

31

Use of neural networks to model low-temperature tungsten etch characteristics in high density SF6 plasma

Byungwhan Kim, Jun Hyup Sun, Chang Ju Choi,

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

2000

25

Magnetic tunnel junction pattern technique

Eugene Chen, B. Schwarz, Chang Ju Choi,

Journal of Applied Physics

2003

16

TiN Etching and Its Effects on Tungsten Etching in SF<sub>6</sub>/Ar Helicon Plasma

Chang Ju Choi, Yeo Song Seol, Ki‐Ho Baik

Japanese Journal of Applied Physics

1998

14

TaN-based EUV mask absorber etch study

Yan Du, Chang Ju Choi, Guojing Zhang,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2006

11

Intracluster ion-molecule reactions within methane homoclusters

Hun Jung Yi, Yong Shin Kim, Chang Ju Choi,

Journal of Mass Spectrometry

1998

10

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