Concepedia

Chang Ju Choi

CJ

Statistics

Publications

6

Citations

107

H-Index

6

Active since

1998

Affiliations

Chonnam National University(Current)

Chang Ju Choi is an author at Chonnam National University specializing in engineering, applied physics, and natural sciences.

Top concepts

EngineeringApplied PhysicsPhysicsMicroelectronicsNatural SciencesChemical EngineeringElectrical EngineeringChemistrySurface ScienceMaterial Science

Publications per year

1998–2006

6

Publications

6

Ar addition effect on mechanism of fluorocarbon ion formation in CF4/Ar inductively coupled plasma

Chang Ju Choi, Osung Kwon, Yeo Song Seol et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 31 citations

Langmuir Probe, Engineering, Fluorocarbon Ion Formation +16

Use of neural networks to model low-temperature tungsten etch characteristics in high density SF6 plasma

Byungwhan Kim, Jun Hyup Sun, Chang Ju Choi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 25 citations

Sf6 Flow Rate, Optical Materials, Engineering +17

Magnetic tunnel junction pattern technique

Eugene Chen, B. Schwarz, Chang Ju Choi et al. · Journal of Applied Physics · 2003 · 16 citations

Magnetism, Spintronics, Electrical Engineering +15

TiN Etching and Its Effects on Tungsten Etching in SF<sub>6</sub>/Ar Helicon Plasma

Chang Ju Choi, Yeo Song Seol, Ki‐Ho Baik · Japanese Journal of Applied Physics · 1998 · 14 citations

Engineering, Plasma Physics, Vacuum Device +16

TaN-based EUV mask absorber etch study

Yan Du, Chang Ju Choi, Guojing Zhang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 11 citations

Electrical Engineering, Engineering, Extreme Ultraviolet Lithography +13

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