Concepedia

Motoyuki Shima

MS

Statistics

Publications

4

Citations

64

H-Index

4

Active since

2005

Affiliations

JSR (Japan)(Current)

Motoyuki Shima is an author at JSR (Japan) specializing in applied physics, engineering, and materials science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceOphthalmologyMicrofabricationOptical MaterialsOptical PropertiesMedicineMicroscopy

Publications per year

2005–2007

4

Publications

4

Material design for immersion lithography with high refractive index fluid (HIF)

Takashi Miyamatsu, Yong Wang, Motoyuki Shima et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 22 citations

Engineering, Optic Design, Biomedical Engineering +19

Advanced materials for 193 nm immersion lithography

Shiro Kusumoto, Motoyuki Shima, Yong Wang et al. · Polymers for Advanced Technologies · 2006 · 19 citations

Materials Science, Chemical Engineering, Optical Materials +15

Various factors of the image blur in chemically amplified resist

Takanori Kawakami, Tomoki Nagai, Yukio Nishimura et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 12 citations

Materials Science, Optical Materials, Engineering +14

High-refractive-index fluids for the next-generation ArF immersion lithography

Yong Wang, Takashi Miyamatsu, Taiichi Furukawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 11 citations

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