Concepedia

Takashi Miyamatsu

TM

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Publications

3

Citations

44

H-Index

3

Active since

2005

Affiliations

JSR (Japan)(Current)

Takashi Miyamatsu is an author at JSR (Japan) specializing in optical properties, applied physics, and microfabrication.

Top concepts

Publications per year

2005–2007

3

Publications

3

Material design for immersion lithography with high refractive index fluid (HIF)

Takashi Miyamatsu, Yong Wang, Motoyuki Shima et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 22 citations

, , +19

High-refractive index material design for ArF immersion lithography

Taiichi Furukawa, Takanori Kishida, Takashi Miyamatsu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 11 citations

, , +13

High-refractive-index fluids for the next-generation ArF immersion lithography

Yong Wang, Takashi Miyamatsu, Taiichi Furukawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 11 citations

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