Statistics
Publications
1
Citations
43
H-Index
1
Active since
1993
Affiliations
Toshiba (Japan)(Current)
H. Kusakabe is an author at Toshiba (Japan) specializing in electron beam physics, computer engineering, and objective lens design.
Publications per year
1993–1993
1
1
Electron-beam direct writing system EX-8D employing character projection exposure method
Kiyoshi Hattori, Ryoichi Yoshikawa, H. Wada et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 43 citations
Engineering, Computer Engineering, Electrical Engineering +16
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