Calibration procedure for temperature measurements by thermoreflectance under high magnification conditions

S. Dilhaire, Stéphane Grauby, W. Claeys

Applied Physics Letters

EngineeringMeasurementOptical TestingEducationCalibration Procedure +21

Laser beam thermography of circuits in the particular case of passivated semiconductors

Véronique Quintard, Gerald Deboy, S. Dilhaire, +3

Microelectronic Engineering

SemiconductorsSemiconductor TechnologyElectrical EngineeringParticular CaseEngineering +10

Thermoreflectance optical test probe for the measurement of current‐induced temperature changes in microelectronic components

W. Claeys, S. Dilhaire, Véronique Quintard, +2

Quality and Reliability Engineering International

Optical MaterialsEngineeringMeasurementOptical TestingEducation +24

Laser probing of thermal behaviour of electronic components and its application in quality and reliability testing

W. Claeys, S. Dilhaire, Véronique Quintard

Microelectronic Engineering

Electrical EngineeringEngineeringHardware ReliabilityOptical PropertiesThermal Behaviour +13

Imaging setup for temperature, topography, and surface displacement measurements of microelectronic devices

Stéphane Grauby, S. Dilhaire, S. Jorez, +1

Review of Scientific Instruments

EngineeringMicroscopyTransient ImagingMicroelectronic DevicesElectronic Devices +21

Thermoreflectance calibration procedure on a laser diode: application to catastrophic optical facet damage analysis

S. Dilhaire, Stéphane Grauby, W. Claeys

IEEE Electron Device Letters

EngineeringOptical TestingLaser ApplicationsThermoreflectance CoefficientsOptical Properties +18

Study of thermomechanical properties of Si∕SiGe superlattices using femtosecond transient thermoreflectance technique

Younès Ezzahri, S. Dilhaire, Stéphane Grauby, +5

Applied Physics Letters

Materials ScienceSi∕sige SuperlatticesThermomechanical PropertiesEngineeringPhysics +12

Temperature variation mapping of a microelectromechanical system by thermoreflectance imaging

Stéphane Grauby, S. Dilhaire, S. Jorez, +1

IEEE Electron Device Letters

EngineeringDifferential Scanning CalorimetryMicroscopyThermoreflectance CoefficientsPolysilicon Resistor +17

A heterodyne method for the thermal observation of the electrical behavior of high-frequency integrated circuits

Josep Altet, E. Aldrete-Vidrio, D. Mateo, +8

Measurement Science and Technology

EngineeringIntegrated CircuitsInterconnect (Integrated Circuits)Electrical BehaviorNanoelectronics +25

Laser scanning thermoreflectance imaging system using galvanometric mirrors for temperature measurements of microelectronic devices

Stéphane Grauby, A. Salhi, J. M. Rampnoux, +3

Review of Scientific Instruments