5
Publications
522
Citations
5
H-Index
2009
Active since
Affiliations
Sung-Wook Nam is an author at Massachusetts Institute of Technology specializing in materials science, engineering, and nanoelectronics.
Top concepts
EngineeringMaterial ScienceChemistryApplied PhysicsNanoelectronicsMicroelectronicsHydrogenSolar CellsNanomaterialsNanomechanics
Publications per year
2009–2020
5
5
Understanding of hydrogen silsesquioxane electron resist for sub-5-nm-half-pitch lithography
Joel K. W. Yang, B. Cord, Huigao Duan et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 180 citations · Full text
Materials Engineering, Materials Science, Wafer Scale Processing +15
Bonhyeong Koo, Daehan Kim, Passarut Boonmongkolras et al. · ACS Applied Energy Materials · 2020 · 44 citations
Engineering, Inorganic Photochemistry, Energy Conversion +19
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