Concepedia

S. W. LOH

SW

2

Publications

47

Citations

2

H-Index

2001

Active since

Affiliations

Institute of Microelectronics(Current)

Nanyang Technological University

S. W. LOH is an author at Institute of Microelectronics specializing in engineering, materials engineering, and applied physics.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceMaterials EngineeringNanoelectronicsMicroelectronicsIntegrated CircuitsElectronic PackagingElectrical Engineering

Publications per year

2001–2004

2

Publications

2

Study of copper diffusion into Ta and TaN barrier materials for MOS devices

S. W. LOH, D.H. Zhang, C.Y. Li et al. · Thin Solid Films · 2004 · 34 citations

Materials Engineering, Materials Science, Copper Diffusion +9

Effect of a thin ionized-metal-plasma deposited Cu layer on the properties and thermal stability of Cu-TaN-SiO/sub 2/-Si structures

D.H. Zhang, S. W. LOH, C.Y. Li et al. · IEEE Transactions on Device and Materials Reliability · 2001 · 13 citations

Engineering, Thin Ionized-metal-plasma, Cu Layer +17

Rows per page

1–2 of 2