Concepedia

C.Y. Li

CL

1

Publications

13

Citations

1

H-Index

2001

Active since

Affiliations

Institute of Microelectronics(Current)

C.Y. Li is an author at Institute of Microelectronics specializing in integrated circuits, materials engineering, and applied physics.

Top concepts

EngineeringApplied PhysicsNanoelectronicsSurface ScienceMaterial ScienceMicroelectronicsIntegrated CircuitsElectronic PackagingMaterials EngineeringElectrical Engineering

Publications per year

2001–2001

1

Publications

1

Effect of a thin ionized-metal-plasma deposited Cu layer on the properties and thermal stability of Cu-TaN-SiO/sub 2/-Si structures

D.H. Zhang, S. W. LOH, C.Y. Li et al. · IEEE Transactions on Device and Materials Reliability · 2001 · 13 citations

Engineering, Thin Ionized-metal-plasma, Cu Layer +17

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