Statistics
Publications
2
Citations
36
H-Index
2
Active since
1994
Affiliations
University of Wisconsin–Madison(Current)
Steven J. Rhyner is an author at University of Wisconsin–Madison specializing in x-ray lithography, materials science, and natural sciences.
Publications per year
1994–1996
2
2
Modeling and simulations of a positive chemically amplified photoresist for x-ray lithography
Azalia A. Krasnoperova, Muhammad Burhan Khan, Steven J. Rhyner et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 26 citations
Natural Sciences, Materials Engineering, Materials Science +16
Resist application effects on chemically amplified resist response
Paul M. Dentinger, Carla M. Nelson, Steven J. Rhyner et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 10 citations
Natural Sciences, Materials Engineering, Materials Science +13
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