Concepedia

Shih−Chia Chang

SC

13

Publications

883

Citations

12

H-Index

1974

Active since

Affiliations

General Motors (United States)(Current)

Princeton University

Aptiv (United States)

Shih−Chia Chang is an author at General Motors (United States) specializing in engineering, materials science, and microfabrication.

Top concepts

EngineeringMaterial ScienceSurface ScienceMicrofabricationChemistryThin FilmsApplied PhysicsMicroelectronicsElectrical EngineeringSensors

Publications per year

1974–2003

13

Publications

13

Oxygen chemisorption on tin oxide: Correlation between electrical conductivity and EPR measurements

Shih−Chia Chang · Journal of Vacuum Science and Technology · 1980 · 411 citations

Materials Science, Tin Oxide, Oxygen Reduction Reaction +13

Thin-film semiconductor NO<sub>x</sub>sensor

Shih−Chia Chang · IEEE Transactions on Electron Devices · 1979 · 100 citations

Engineering, Gas Sensor, Thin Film Process Technology +18

The crystallography of the polar (0001) Zn and (0001)O surfaces of zinc oxide

Shih−Chia Chang, Peter Mark · Surface Science · 1974 · 82 citations

Process Integration for active polysilicon resonant microstructures

Michael W. Putty, Shih−Chia Chang, Roger T. Howe et al. · Sensors and Actuators · 1989 · 53 citations · Full text

Materials Science, Process Integration, Engineering +5

The crystallography of the principal non-polar (1120) and (1010) surfaces of zinc oxide

Shih−Chia Chang, Peter Mark · Surface Science · 1974 · 43 citations

Rows per page

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