Matthew Vernon is an author at AT&T (United States) specializing in engineering, applied physics, and optical properties.
Top concepts
EngineeringApplied PhysicsOptical MaterialsOptical PropertiesPhysicsMedicineMicroscopyRadiometryThin FilmsOphthalmology
Publications per year
1992–1994
3
3
Matthew Vernon, Todd R. Hayes, V. M. Donnelly · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 31 citations
Phase-shifting mask topography effects on lithographic image quality
Christophe Pierrat, Alfred K. K. Wong, Sheila Vaidya et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993 · 12 citations
Optical Materials, Engineering, Electron-beam Lithography +17
Rows per page
1–3 of 3