Kouji Kosaka

Sub-Nanometer Resolution Ultrasonic Motor for 300 mm Wafer Lithography Precision Stage

Yoshiya Egashira, Kouji Kosaka, Tetsuya Iwabuchi et al. · Japanese Journal of Applied Physics · 2002 · 45 citations

Nonresonant Ultrasonic Motor, Electrical Engineering, High Resolution +14

0.69 nm resolution ultrasonic motor for large stroke precision stage

Yoshiya Egashira, Kouji Kosaka, S. Takada et al. · 2002 · 21 citations

Electrical Engineering, High Resolution, Engineering +13

A novel ion imager for secondary ion mass spectrometry

Kazuya Matsumoto, Hisayoshi Yurimoto, Kouji Kosaka et al. · IEEE Transactions on Electron Devices · 1993 · 19 citations

Microscopy, Biological Mass Spectrometry, Area Detector +16

Development of nano-surgery system for cell organelles

Fumito Imura, Akira Nakada, Yoshiya Egashira et al. · 2003 · 17 citations

Nanoparticles, Tissue Engineering, Engineering +16

Development of an ultra-precision stage control system using nonresonant ultrasonic motor

Seiji Hashimoto, Kiyoshi Ohishi, T. Ohishi et al. · 2004 · 13 citations

Control Bandwidth, Motion Control, Nonresonant Ultrasonic Motor +12