Concepedia

Yoshiya Egashira

YE

5

Publications

107

Citations

5

H-Index

2002

Active since

Affiliations

Kumamoto University(Current)

Tohoku University

National Institute of Technology, Kumamoto College

Tokyo University of Technology

Tokyo Institute of Technology

Yoshiya Egashira is an author at Kumamoto University specializing in engineering, mechanical engineering, and mechatronics.

Top concepts

EngineeringMechatronicsMechanical EngineeringUltrasoundElectrical EngineeringPropulsionMicrofabricationVibration ControlMechanical SystemsMedicine

Publications per year

2002–2006

5

Publications

5

Sub-Nanometer Resolution Ultrasonic Motor for 300 mm Wafer Lithography Precision Stage

Yoshiya Egashira, Kouji Kosaka, Tetsuya Iwabuchi et al. · Japanese Journal of Applied Physics · 2002 · 45 citations

Nonresonant Ultrasonic Motor, Electrical Engineering, High Resolution +14

0.69 nm resolution ultrasonic motor for large stroke precision stage

Yoshiya Egashira, Kouji Kosaka, S. Takada et al. · 2002 · 21 citations

Electrical Engineering, High Resolution, Engineering +13

Development of nano-surgery system for cell organelles

Fumito Imura, Akira Nakada, Yoshiya Egashira et al. · 2003 · 17 citations

Nanoparticles, Tissue Engineering, Engineering +16

Development of an ultra-precision stage control system using nonresonant ultrasonic motor

Seiji Hashimoto, Kiyoshi Ohishi, T. Ohishi et al. · 2004 · 13 citations

Control Bandwidth, Motion Control, Nonresonant Ultrasonic Motor +12

Wear Reduction Method for Frictionally Fast Feeding Piezoactuator

Kouji Kosaka, Tetsuya Iwabuchi, Tetsuro Baba et al. · Japanese Journal of Applied Physics · 2006 · 11 citations

Wear Reduction Method, Electrical Engineering, Engineering +12

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