Concepedia

Tetsuro Baba

TB

3

Publications

77

Citations

3

H-Index

2002

Active since

Affiliations

Kumamoto University(Current)

Tohoku University

Tetsuro Baba is an author at Kumamoto University specializing in electrical engineering, engineering, and instrumentation.

Top concepts

Publications per year

2002–2014

3

Publications

3

Sub-Nanometer Resolution Ultrasonic Motor for 300 mm Wafer Lithography Precision Stage

Yoshiya Egashira, Kouji Kosaka, Tetsuya Iwabuchi et al. · Japanese Journal of Applied Physics · 2002 · 45 citations

, , +14

Gas Flow Dependence on Dynamic Behavior of Serpentine Plasma in Gliding Arc Discharge System

Fumiaki Mitsugi, Tamiko Ohshima, Hiroharu Kawasaki et al. · IEEE Transactions on Plasma Science · 2014 · 21 citations

, , +12

Wear Reduction Method for Frictionally Fast Feeding Piezoactuator

Kouji Kosaka, Tetsuya Iwabuchi, Tetsuro Baba et al. · Japanese Journal of Applied Physics · 2006 · 11 citations

, , +12

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