Concepedia

S. Kurth

SK

7

Publications

164

Citations

7

H-Index

1997

Active since

Affiliations

Chemnitz University of Technology(Current)

Fraunhofer Institute for Electronic Nano Systems

S. Kurth is an author at Chemnitz University of Technology specializing in microfabrication, engineering, and mechanical engineering.

Top concepts

EngineeringMicrofabricationMechanical EngineeringInstrumentationMicroelectronicsPhotonicsMechanical SystemsOptical PropertiesIntegrated CircuitsElectrical Engineering

Publications per year

1997–2011

7

Publications

7

BEOL embedded RF-MEMS switch for mm-wave applications

Mehmet Kaynak, K.‐E. Ehwald, J. Drews et al. · 2009 · 47 citations

Electrical Engineering, Engineering, Radio Frequency +15

Simulation of gas damping in microstructures with nontrivial geometries

Jan Mehner, S. Kurth, Detlef Billep et al. · 2002 · 34 citations

Engineering, Analogy Relations, Micromechanics +20

Silicon mirrors and micromirror arrays for spatial laser beam modulation

Wolfram Dötzel, R. Hahn, Christian A. Kaufmann et al. · 2002 · 25 citations

Engineering, Mechanical Engineering, Integrated Circuits +17

Dual-band MEMS Fabry-Pérot filter with two movable reflectors for mid- and long-wave infrared microspectrometers

Marco Meinig, Martin Ebermann, Norbert Neumann et al. · 2011 · 19 citations

Photonics, Sensor Technology, Fast Microspectrometer Module +14

Experimental adaptation of model parameters for microelectromechanical systems (MEMS)

S. Kurth, Wolfram Dötzel · Sensors and Actuators A Physical · 1997 · 15 citations

Engineering, Microfabrication, Mechanical Systems +4

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