Concepedia

Masakazu Furukawa

MF

6

Publications

91

Citations

6

H-Index

1983

Active since

Affiliations

Canon (Japan)(Current)

Tokai University

Hosei University

Masakazu Furukawa is an author at Canon (Japan) specializing in engineering, applied physics, and electrical engineering.

Top concepts

EngineeringApplied PhysicsMaterial ScienceElectrical EngineeringSurface ScienceAntennaMagnetohydrodynamicsComputational ElectromagneticsMicroscopyThin Films

Publications per year

1983–2009

6

Publications

6

Contact Resistance of Al/Si Ohmic Electrodes Formed by Rapid Lamp Sintering.

Tohru Hara, Hidenori Suzuki, Masakazu Furukawa et al. · Japanese Journal of Applied Physics · 1983 · 22 citations

Materials Science, Electrical Engineering, Engineering +12

Production of Large-Diameter Microwave Plasma with a High-Permittivity Material Window

Masakazu Furukawa, Naoki Saito, Katsufumi Kawamura et al. · Japanese Journal of Applied Physics · 1998 · 16 citations

Electrical Engineering, Engineering, Alumina Window +12

Ashing Properties in a Surface-Wave Mode Plasma with a High-Permittivity Alumina Window

Keisuke Shinagawa, Haruo Shindo, Kouta Kusaba et al. · Japanese Journal of Applied Physics · 2001 · 15 citations

Materials Science, Electrical Engineering, Engineering +11

Reflow of PSG Layers by Halogen Lamp Short Duration Heating Technique

Tohru Hara, Hidenori Suzuki, Masakazu Furukawa · Japanese Journal of Applied Physics · 1984 · 13 citations

Materials Science, Tapered Contours, Electrical Engineering +14

A New Method of Line Plasma Production by Microwave in a Narrowed Rectangular Waveguide

Yasuhito Kimura, Hideki Kawaguchi, Shin Kagami et al. · Applied Physics Express · 2009 · 13 citations

High Density, Engineering, Antenna +9

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