Concepedia

Tohru Hara

TH

Statistics

Publications

51

Citations

980

H-Index

19

Active since

1964

Affiliations

Hosei University(Current)

Panasonic (Japan)

Tohru Hara is an author at Hosei University specializing in materials science, materials engineering, and natural sciences.

Publications per year

1964–2003

51

Publications

51

Deposition and Properties of Reactively Sputtered Ruthenium Dioxide Films

K. Sakiyama, Sigeo Onishi, Kazuya Ishihara et al. · Journal of The Electrochemical Society · 1993 · 50 citations

, , +17

Properties of Titanium Nitride Films for Barrier Metal in Aluminum Ohmic Contact Systems

Tohru Hara, Akira Yamanoue, Hiroki Iio et al. · Japanese Journal of Applied Physics · 1991 · 43 citations

, , +17

Chemical Vapor Deposition of Silicon Nitride: Encapsulant Layers for Annealing Gallium Arsenide

Taroh Inada, Tatsuya Ohkubo, S. Sawada et al. · Journal of The Electrochemical Society · 1978 · 40 citations

, , +17

Barrier Properties for Oxygen Diffusion in a TaSiN Layer

Tohru Hara, Masaru Tanaka, K. Sakiyama et al. · Japanese Journal of Applied Physics · 1997 · 39 citations

, , +17

Stress in Copper Seed Layer Employing in the Copper Interconnection

Tohru Hara, Kohji SAKATA · Electrochemical and Solid-State Letters · 2001 · 35 citations

, , +13

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