K. Sakiyama

High-Temperature Etching of PZT/Pt/TiN Structure by High-Density ECR Plasma

Seiichi Yokoyama, Yasuyuki Ito, Kazuya Ishihara et al. · Japanese Journal of Applied Physics · 1995 · 83 citations

Materials Science, Materials Engineering, Engineering +14

Novel ultrahigh-density flash memory with a stacked-surrounding gate transistor (S-SGT) structured cell

Tetsuo Endoh, K. Kinoshita, T. Tanigami et al. · IEEE Transactions on Electron Devices · 2003 · 69 citations

Non-volatile Memory, Electrical Engineering, Stacked-surrounding Gate Transistor +14

Deposition and Properties of Reactively Sputtered Ruthenium Dioxide Films

K. Sakiyama, Sigeo Onishi, Kazuya Ishihara et al. · Journal of The Electrochemical Society · 1993 · 50 citations

Materials Science, Materials Engineering, Oxide Heterostructures +12

Design methodology and synthesis techniques for ladder-type SAW resonator coupled filters

M. Hikita, Nobuhiko Shibagaki, T. Akagi et al. · 1993 · 41 citations

Barrier Properties for Oxygen Diffusion in a TaSiN Layer

Tohru Hara, Masaru Tanaka, K. Sakiyama et al. · Japanese Journal of Applied Physics · 1997 · 39 citations

Materials Science, Electrical Engineering, Tasin Layer +15