Concepedia

Keisuke Shinagawa

KS

3

Publications

112

Citations

3

H-Index

1990

Active since

Affiliations

Tokai University(Current)

Keisuke Shinagawa is an author at Tokai University specializing in engineering, chemistry, and chemical kinetics.

Top concepts

Publications per year

1990–2001

3

Publications

3

Resist stripping in an O2+H2O plasma downstream

Shuzo Fujimura, Keisuke Shinagawa, Miki Suzuki et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 62 citations

, , +18

Additive Nitrogen Effects on Oxygen Plasma Downstream Ashing

Shuzo Fujimura, Keisuke Shinagawa, Moritaka Nakamura et al. · Japanese Journal of Applied Physics · 1990 · 35 citations

, , +11

Ashing Properties in a Surface-Wave Mode Plasma with a High-Permittivity Alumina Window

Keisuke Shinagawa, Haruo Shindo, Kouta Kusaba et al. · Japanese Journal of Applied Physics · 2001 · 15 citations

, , +11

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