Concepedia

Kouta Kusaba

KK

3

Publications

38

Citations

3

H-Index

1999

Active since

Affiliations

Tokai University(Current)

Kouta Kusaba is an author at Tokai University specializing in applied physics, engineering, and electrical engineering.

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Publications per year

1999–2007

3

Publications

3

Ashing Properties in a Surface-Wave Mode Plasma with a High-Permittivity Alumina Window

Keisuke Shinagawa, Haruo Shindo, Kouta Kusaba et al. · Japanese Journal of Applied Physics · 2001 · 15 citations

, , +11

A new emissive-probe method for electron temperature measurement in radio-frequency plasmas

Kouta Kusaba, Haruo Shindo · Review of Scientific Instruments · 2007 · 12 citations

, , +21

Enhancement of Negative-Ion-Assisted Silicon Oxidation by Radio-Frequency Bias

Takashi Fujii, Hitoshi Aoyagi, Kouta Kusaba et al. · Japanese Journal of Applied Physics · 1999 · 11 citations

, , +13

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