Shuzo Fujimura

Resist stripping in an O2+H2O plasma downstream

Shuzo Fujimura, Keisuke Shinagawa, Miki Suzuki et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 62 citations

Natural Sciences, Materials Science, Physics +14

Initial stage of native oxide growth on hydrogen terminated silicon (111) surfaces

Hiroki Ogawa, Kenji Ishikawa, Carlos Inomata et al. · Journal of Applied Physics · 1996 · 60 citations

Natural Sciences, Chemistry, Materials Science +17

Ashing of Ion-Implanted Resist Layer

Shuzo Fujimura, Jun'ichi Konno, K. Hikazutani et al. · Japanese Journal of Applied Physics · 1989 · 46 citations

Natural Sciences, Materials Engineering, Materials Science +10

Car-sharing intention analysis in Japan by comparing the utility of car ownership for car-owners and non-car owners

Keigo Ikezoe, Eriko Kiriyama, Shuzo Fujimura · Transport Policy · 2020 · 39 citations

Law, Automotive Engineering, Co-ownership +2

Hydrogen Passivation of Donors and Hydrogen States in Heavily Doped n-Type Silicon

Naoki Fukata, Shin‐ichi Sasaki, Shuzo Fujimura et al. · Japanese Journal of Applied Physics · 1996 · 37 citations

Engineering, Materials Engineering, Materials Science +15