Concepedia

Shuzo Fujimura

SF

Statistics

Publications

19

Citations

545

H-Index

14

Active since

1988

Affiliations

Fujitsu (Japan)(Current)

Tokyo Institute of Technology

University of Tsukuba

Shuzo Fujimura is an author at Fujitsu (Japan) specializing in applied physics, engineering, and chemistry.

Top concepts

EngineeringApplied PhysicsChemistrySurface ScienceMaterial ScienceNatural SciencesChemical EngineeringHydrogenPhysicsPhysical Chemistry

Publications per year

1988–2021

19

Publications

19

Resist stripping in an O2+H2O plasma downstream

Shuzo Fujimura, Keisuke Shinagawa, Miki Suzuki et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 62 citations

Engineering, Glow Discharge, Plasma Physics +18

Initial stage of native oxide growth on hydrogen terminated silicon (111) surfaces

Hiroki Ogawa, Kenji Ishikawa, Carlos Inomata et al. · Journal of Applied Physics · 1996 · 60 citations

Materials Science, Surface Characterization, Initial Stage +11

Ashing of Ion-Implanted Resist Layer

Shuzo Fujimura, Jun'ichi Konno, K. Hikazutani et al. · Japanese Journal of Applied Physics · 1989 · 46 citations

Engineering, Plasma Processing, Chemical Engineering +16

Car-sharing intention analysis in Japan by comparing the utility of car ownership for car-owners and non-car owners

Keigo Ikezoe, Eriko Kiriyama, Shuzo Fujimura · Transport Policy · 2020 · 38 citations

Economics, Car-sharing Intention Analysis, Business +4

Hydrogen Passivation of Donors and Hydrogen States in Heavily Doped n-Type Silicon

Naoki Fukata, Shin‐ichi Sasaki, Shuzo Fujimura et al. · Japanese Journal of Applied Physics · 1996 · 37 citations

Semiconductors, Hydrogen Passivation, Engineering +13

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