Statistics
Publications
3
Citations
97
H-Index
3
Active since
1999
Affiliations
Tsu-Hsiu Perng is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in cmos circuit design, computer engineering, and semiconductor devices.
Publications per year
1999–2010
3
3
Effects of H2 plasma treatment on low dielectric constant methylsilsesquioxane
Ting‐Chang Chang, Po‐Tsun Liu, Yu-Jen Mei et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 52 citations
Natural Sciences, Materials Engineering, Materials Science +17
1–3 of 3