Statistics
Publications
23
Citations
1.8K
H-Index
17
Active since
1991
Mitsuru Satô is an author at Tokyo Ohka Kogyo (Japan) specializing in engineering, materials science, and polymer science.
Publications per year
1991–2018
23
23
Proton Dynamics in Chemically Amplified Electron Beam Resists
Hiroki Yamamoto, Takahiro Kozawa, Atsuro Nakano et al. · Japanese Journal of Applied Physics · 2004 · 179 citations
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