Statistics
Publications
7
Citations
127
H-Index
7
Active since
2004
Affiliations
Akita Prefectural University(Current)
N. Kobayashi is an author at Akita Prefectural University specializing in engineering, applied physics, and materials science.
Publications per year
2004–2012
7
7
UV/EB Cure Mechanism for Porous PECVD/SOD Low-k SiCOH Materials
Shu Nakao, Jiro Ushio, Takahisa Ohno et al. · 2006 · 18 citations
Materials Science, Materials Engineering, Electrical Engineering +13
Low-pressure CMP for 300-mm ultra low-k (k=1.6-1.8)/Cu integration
S. Kondo, Boram Yoon, S. Tokitoh et al. · 2004 · 16 citations
Materials Engineering, Materials Science, Electrical Engineering +15
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