Concepedia

K. Fukaya

KF

3

Publications

48

Citations

3

H-Index

2006

Active since

Affiliations

Sanyo (Japan)(Current)

K. Fukaya is an author at Sanyo (Japan) specializing in surface science, engineering, and materials engineering.

Top concepts

Publications per year

2006–2007

3

Publications

3

Damageless Cu chemical mechanical polishing for porous SiOC/Cu interconnects

Seiichi Kondo, K. Fukaya, Koji Yamada et al. · Microelectronic Engineering · 2007 · 21 citations

, , +6

Direct CMP on Porous Low-k Film for Damage-less Cu Integration

S. Kondo, K. Fukaya, N. Ohashi et al. · 2006 · 15 citations

Effect of the Hydrophilic-Lipophilic Balance (HLB) of Surfactants Included in the Post-CMP Cleaning Chemicals on Porous SiOC Direct CMP

Shinnosuke Kondo, Morio Shiohara, K. Maruyama et al. · 2007 · 12 citations

, , +21

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