Concepedia

Morio Shiohara

MS

4

Publications

57

Citations

4

H-Index

2007

Active since

Affiliations

Organ Technologies (Japan)(Current)

Morio Shiohara is an author at Organ Technologies (Japan) specializing in engineering, surface science, and materials engineering.

Top concepts

EngineeringSurface ScienceMaterial ScienceChemical EngineeringMaterials EngineeringCorrosionApplied PhysicsElectronic PackagingElectrical EngineeringSurfactants

Publications per year

2007–2009

4

Publications

4

Galvanic Corrosion Control in Chemical Mechanical Polishing of Cu Interconnects with Ruthenium Barrier Metal Film

Koji Maruyama, Morio Shiohara, Koji Yamada et al. · Japanese Journal of Applied Physics · 2009 · 21 citations

Materials Science, Materials Engineering, Chemical Engineering +14

Amorphous Ru / Polycrystalline Ru Highly Reliable Stacked Layer Barrier Technology

Shinichi Ogawa, Nobuaki Tarumi, Mitsuhide Abe et al. · 2008 · 14 citations

Materials Science, Materials Engineering, Electrical Engineering +15

Effect of the Hydrophilic-Lipophilic Balance (HLB) of Surfactants Included in the Post-CMP Cleaning Chemicals on Porous SiOC Direct CMP

Shinnosuke Kondo, Morio Shiohara, K. Maruyama et al. · 2007 · 12 citations

Sioc Film Damage, Engineering, Surfactants Included +21

Effect of Dissolved Oxygen on Cu Corrosion in Single Wafer Cleaning Process

M. Imai, Yukinari Yamashita, T. Futatsuki et al. · Japanese Journal of Applied Physics · 2009 · 10 citations

Engineering, Mineral Processing, Interconnect (Integrated Circuits) +16

Rows per page

1–4 of 4