Statistics
Publications
3
Citations
145
H-Index
3
Active since
1993
Affiliations
Oki Electric Industry (Japan)(Current)
S. Tokitoh is an author at Oki Electric Industry (Japan) specializing in engineering, applied physics, and materials science.
Publications per year
1993–2004
3
3
Low-pressure CMP for 300-mm ultra low-k (k=1.6-1.8)/Cu integration
S. Kondo, Boram Yoon, S. Tokitoh et al. · 2004 · 16 citations
Materials Engineering, Materials Science, Electrical Engineering +15
Low-pressure CMP for reliable porous low-k/Cu integration
S. Kondo, S. Tokitoh, Boram Yoon et al. · 2004 · 15 citations
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