Concepedia

Hidetsugu Uchida Hidetsugu Uchida

HU

2

Publications

135

Citations

2

H-Index

1993

Active since

Affiliations

Oki Electric Industry (Japan)(Current)

Hidetsugu Uchida Hidetsugu Uchida is an author at Oki Electric Industry (Japan) specializing in applied physics, surface science, and engineering.

Top concepts

EngineeringApplied PhysicsSurface SciencePhysicsChemistryThin FilmsNanoelectronicsMaterial ScienceMicroelectronicsSurface Chemistry

Publications per year

1993–1997

2

Publications

2

Thermal Desorption and Infrared Studies of Plasma-Enhanced Chemical Vapor Deposited SiO Films with Tetraethylorthosilicate

Norio Hirashita, S. Tokitoh, Hidetsugu Uchida Hidetsugu Uchida · Japanese Journal of Applied Physics · 1993 · 114 citations

Engineering, Chemistry, Silicon On Insulator +18

Cross-sectional Transmission Electron Microscope Studies on Intrinsic Breakdown Spots of Thin Gate Oxides

Satoshi Ikeda, Masao Okihara, Hidetsugu Uchida Hidetsugu Uchida et al. · Japanese Journal of Applied Physics · 1997 · 21 citations

Thin Gate Oxides, Electrical Engineering, Engineering +14

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