Sang-Won Kang

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Publications

Citations

599

H-Index

Active since

1994

Affiliations

Korea Advanced Institute of Science and Technology(Current)

Sang-Won Kang is an author at Korea Advanced Institute of Science and Technology specializing in thin films, materials engineering, and materials science.

ORCID

Publications per year

1994–2010

Publications

Enhancement of dielectric constant in HfO2 thin films by the addition of Al2O3

Pan Kwi Park, Sang-Won Kang · Applied Physics Letters · 2006 · 145 citations

Natural Sciences, Materials Engineering, Materials Science +17

Plasma-Enhanced Atomic Layer Deposition of Ta-N Thin Films

Jin‐Seong Park, Hyung‐Sang Park, Sang-Won Kang · Journal of The Electrochemical Society · 2002 · 118 citations

Natural Sciences, Materials Engineering, Materials Science +17

Plasma-Enhanced Atomic Layer Deposition of Ru–TiN Thin Films for Copper Diffusion Barrier Metals

Se‐Hun Kwon, Oh-Kyum Kwon, Jae-Sik Min et al. · Journal of The Electrochemical Society · 2006 · 66 citations

Natural Sciences, Materials Engineering, Materials Science +17

Interface effect on dielectric constant of HfO2∕Al2O3 nanolaminate films deposited by plasma-enhanced atomic layer deposition

Pan Kwi Park, Eun-Soo Cha, Sang-Won Kang · Applied Physics Letters · 2007 · 50 citations

Natural Sciences, Materials Engineering, Materials Science +17

TiO[sub 2]∕Al[sub 2]O[sub 3]∕TiO[sub 2] Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition

Woojin Jeon, Hoi-Sung Chung, Dae-Kwon Joo et al. · Electrochemical and Solid-State Letters · 2007 · 48 citations

Natural Sciences, Materials Engineering, Materials Science +17

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