J. R. Monkowski

The effects of processing conditions on the out-diffusion of oxygen from Czochralski silicon

D. Heck, R. E. Tressler, J. R. Monkowski · Journal of Applied Physics · 1983 · 44 citations

Materials Engineering, Chemical Engineering, Boron Diffusion +15

An Investigation of Fixed Charge Buildup in Nitrided Oxides

G. A. Ruggles, J. R. Monkowski · Journal of The Electrochemical Society · 1986 · 32 citations

Materials Science, Electrical Engineering, Engineering +8

The Structure and Composition of Silicon Oxides Grown in HCl /  O 2 Ambients

J. R. Monkowski, R. E. Tressler, J. Stach · Journal of The Electrochemical Society · 1978 · 24 citations · Full text

Materials Science, Materials Engineering, Silicon Oxides Grown +13

Comparison of dopant incorporation into polycrystalline and monocrystalline silicon

J. R. Monkowski, J. Bloem, L.J. Giling et al. · Applied Physics Letters · 1979 · 23 citations

Materials Science, Electrical Engineering, Engineering +8

Ion-beam-induced atomic mixing at the SiO2/Si interface

I. S. T. Tsong, J. R. Monkowski, David W. Hoffman · Nuclear Instruments and Methods · 1981 · 23 citations

Ion Implantation, Engineering, Ion-beam-induced Atomic Mixing +4