Ion-beam-induced atomic mixing at the SiO2/Si interface - Concepedia

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Ion-beam-induced atomic mixing at the SiO2/Si interface

23

Citations

20

References

1981

Year

I. S. T. Tsong, J. R. Monkowski, David W. Hoffman

Nuclear Instruments and Methods

Ion ImplantationEngineeringIon-beam-induced Atomic MixingApplied PhysicsAtomic PhysicsIon BeamSilicon On Insulator

References

	Year	Citations

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