Phillip J. Batson

<title>System integration and performance of the EUV engineering test stand</title>

Daniel A. Tichenor, Avijit K. Ray-Chaudhuri, William C. Replogle et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 40 citations

Natural Sciences, Physics, Digital Imaging +7

At-wavelength interferometry for extreme ultraviolet lithography

Edita Tejnil, Kenneth A. Goldberg, Sang-Hun Lee et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 39 citations

Natural Sciences, Materials Science, Optical Materials +16

Characterization of the accuracy of EUV phase-shifting point diffraction interferometry

Patrick Naulleau, Kenneth A. Goldberg, Sang Hun Lee et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1998 · 21 citations

Natural Sciences, Physics, Metrology +13

<title>Beamline for metrology of x-ray/EUV optics at the Advanced Light Source</title>

J. H. Underwood, Eric M. Gullikson, Masato Koike et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 20 citations

Engineering, Physics, Metrology +16

Static microfield printing at the Advanced Light Source with the ETS Set-2 optic

Patrick Naulleau, Kenneth A. Goldberg, Erik H. Anderson et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 11 citations

Engineering, Physics, Optics +12