Concepedia

Shigenori Kato

SK

3

Publications

70

Citations

3

H-Index

2012

Active since

Affiliations

University of Tsukuba(Current)

Shigenori Kato is an author at University of Tsukuba specializing in materials engineering, materials science, and engineering.

Top concepts

Publications per year

2012–2013

3

Publications

3

A New-Type of Defect Generation at a 4H-SiC/SiO<sub>2 </sub>Interface by Oxidation Induced Compressive Strain

Kenta Chokawa, Shigenori Kato, Katsumasa Kamaiya et al. · Materials science forum · 2013 · 33 citations

, , +9

Intrinsic origin of negative fixed charge in wet oxidation for silicon carbide

Yasuhiro Ebihara, Kenta Chokawa, Shigenori Kato et al. · Applied Physics Letters · 2012 · 21 citations · Full text

Origins of Negative Fixed Charge in Wet Oxidation for SiC

Katsumasa Kamiya, Yasuhio Ebihara, Kenta Chokawa et al. · Materials science forum · 2013 · 16 citations

, , +14

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