Concepedia

W. H. Juan

WH

10

Publications

369

Citations

10

H-Index

1993

Active since

Affiliations

University of Michigan(Current)

W. H. Juan is an author at University of Michigan specializing in engineering, applied physics, and microfabrication.

Top concepts

EngineeringApplied PhysicsMicrofabricationMaterial ScienceMicroelectronicsElectrical EngineeringMechanical EngineeringInstrumentationOptoelectronicsPhysics

Publications per year

1993–1999

10

Publications

10

Si nanostructures fabricated by anodic oxidation with an atomic force microscope and etching with an electron cyclotron resonance source

E. S. Snow, W. H. Juan, S. W. Pang et al. · Applied Physics Letters · 1995 · 76 citations · Full text

Engineering, Nanometer-scale Si Structures, Vacuum Device +22

Controlling sidewall smoothness for micromachined Si mirrors and lenses

W. H. Juan, S. W. Pang · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 67 citations

Engineering, Optic Design, Mechanical Engineering +18

High-aspect-ratio Si vertical micromirror arrays for optical switching

W. H. Juan, S. W. Pang · Journal of Microelectromechanical Systems · 1998 · 57 citations

Si Mirrors, Photonics, Electrical Engineering +15

Electrostatic microactuator and design considerations for HDD applications

L.-S. Fan, Toshiki Hirano, John Hong et al. · IEEE Transactions on Magnetics · 1999 · 53 citations

Electrical Engineering, Engineering, Soft Robotics +12

High-aspect-ratio Si etching for microsensor fabrication

W. H. Juan, S. W. Pang · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 30 citations

Rows per page

1–5 of 10