Motohiro Kohno is an author at Nagoya University specializing in applied physics, engineering, and surface science.
Top concepts
EngineeringApplied PhysicsSurface ScienceMaterial ScienceElectrical EngineeringThin FilmsInstrumentationNanoelectronicsElectrochemistryMicroelectronics
Publications per year
1993–2019
2
2
Takamasa Sakai, Motohiro Kohno, Sadao Hirae et al. · Japanese Journal of Applied Physics · 1993 · 27 citations
Engineering, Vacuum Device, Electrode-free Capacitance/voltage Measurement +18
Effects of BCl3 addition to Cl2 gas on etching characteristics of GaN at high temperature
Atsushi Tanide, Shohei Nakamura, Akira Horikoshi et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2019 · 14 citations
Chlorine Compounds, Wide-bandgap Semiconductor, Engineering +17
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