Atsushi Tanide is an author at SCREEN (Japan) specializing in engineering, applied physics, and surface science.
Top concepts
EngineeringApplied PhysicsSurface ScienceChemistryThin FilmsMaterial ScienceMicroelectronicsMaterials EngineeringElectrical Engineering
Publications per year
2019–2020
2
2
Masaki Hasegawa, Takayoshi Tsutsumi, Atsushi Tanide et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2020 · 20 citations
Effects of BCl3 addition to Cl2 gas on etching characteristics of GaN at high temperature
Atsushi Tanide, Shohei Nakamura, Akira Horikoshi et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2019 · 14 citations
Chlorine Compounds, Wide-bandgap Semiconductor, Engineering +17
Rows per page
1–2 of 2