Akira Horikoshi is an author at Nagoya University specializing in applied physics, engineering, and electrical engineering.
Top concepts
Thin FilmsEngineeringApplied PhysicsSurface ScienceMaterial ScienceElectrical Engineering
Publications per year
2019–2019
1
1
Effects of BCl3 addition to Cl2 gas on etching characteristics of GaN at high temperature
Atsushi Tanide, Shohei Nakamura, Akira Horikoshi et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2019 · 14 citations
Chlorine Compounds, Wide-bandgap Semiconductor, Engineering +17
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1–1 of 1