Statistics
Publications
3
Citations
46
H-Index
3
Active since
2006
Affiliations
Carl Zeiss (Germany)(Current)
Rigo Richter is an author at Carl Zeiss (Germany) specializing in emulation, immersion lithography, and engineering.
Publications per year
2006–2007
3
3
Programmed defects study on masks for 45nm immersion lithography using the novel AIMS 45-193i
Thomas Scherübl, A. C. Dürr, Klaus Böhm et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 12 citations
Engineering, Manufacturing Engineering, Materials Science +14
1–3 of 3