Statistics
Publications
3
Citations
179
H-Index
3
Active since
1994
Affiliations
Sanyo-Onoda City University(Current)
Kazuo Nakagawa is an author at Sanyo-Onoda City University specializing in natural sciences, materials science, and polymer engineering.
Publications per year
1994–2001
3
3
Study of the resist deformation in nanoimprint lithography
Yoshihiko Hirai, Masaki Fujiwara, Takahiro Okuno et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 145 citations
Natural Sciences, Materials Engineering, Materials Science +17
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