7
Publications
224
Citations
7
H-Index
1993
Active since
S. Zürn is an author at University of Minnesota specializing in engineering, applied physics, and microfabrication.
Top concepts
EngineeringApplied PhysicsMicrofabricationMaterial ScienceMicroelectronicsMechanical EngineeringSensorsIntegrated CircuitsElectronic PackagingElectrical Engineering
Publications per year
1993–2006
7
7
Q. Mei, T. Tamagawa, C. Ye et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 28 citations
Rows per page
1–5 of 7