Q. Mei is an author at University of Minnesota specializing in electronic packaging, applied physics, and microfabrication.
Top concepts
EngineeringApplied PhysicsMicroelectronicsMicrofabricationIntegrated CircuitsElectronic PackagingElectrical EngineeringNanoelectronicsOptoelectronicsElectronic Devices
Publications per year
1990–2002
3
3
Q. Mei, T. Tamagawa, C. Ye et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 28 citations
Sealed vacuum electronic devices by surface micromachining
Rows per page
1–3 of 3